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Wet Station
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Auto Wet Station
It etches and cleans any stacked membranes on the board of Silicon or Sapphire Wafer.
- Wafer Application : 5”, 6”, 8” and 12” Silicon Wafer
- Loading Method : Auto ~ Manual
- Processing Method : Cassetteless or Cassette Type
- Bath : Teflon & Quartz etc
- Chemical : ACID, Organic, Alkali
- Controller : PLC & Touch Based Control
- Remark : Heating Unit / Chemical Circulation & Filtering / DIW Non-Ohmmeter / G.U.I & Host On-Line is performable.
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Tube Cleaner
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Tube Cleaner
It cleans Quartz Tube for the semi-conductor DIFF process using chemical (HF, HNO3, DIW).
- Size : User’s Spec
- Material : HT PVC & Ivory PVC & SUS304
- Controller : PLC & Touch Based Control
- Auto & Manual Control
- Chemical Mixing Tank
- Horizontal or Vertical type
- Remark : Rolling Unit, PH Meter etc
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Parts Cleaner
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Parts Cleaner
- It cleans jigs and parts of different types for semi-conductor and FPD.
- It cleans materials (Quartz, Al, SiC, Si etc) in super precision using chemical and ultrasonic.
- Customer can order their special equipment with appropriate cleaning method according to their cleaning objects and types of dirt (dust, stain etc), which will be manufactured by Seller.
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Spin Dryer
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Spin Dryer (Hot-N2 Type)
It dries Wafer using Water Cassette of the low RPM and Hot-N2.
- Wafer Application : 4”,5”, 6”, 8” and 12” Silicon wafer
- Method : Auto ~ Manual
- Processing Method : 1~2 Carrier is OK / Vertical or Horizontal Type
- Chemical : DIW
- Controller : PLC & Touch Based Control
- Remark : Hot-N2 System / Recipe is performable
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PLP Cleaner
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PLP CLEANER
- Cell Application : EMC & EMC + Glass (Carrier)
- Loading Method : EFEM Robot Access Lift Pin Loading
- Processing Method : DIW Shower Cleaning
- Controller : PLC & Touch Based Control
- Safety Certificate : KCS Certificate
- Option Item : USC or MSC
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Plating System
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Plating System
It is an electro / electroless plating equipment for Semi-Conductor or Solar Cell Wafer.
- Size : User’s Spec
- Material : White PP & SUS304
- Controller : PLC & Touch Based Control
- Chemical Mixing Tank
- Process : PLC & Touch Based Control