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Chemical Supply System

Chemical Supply System

Chemical Supply System

  •  Facility for Central Chemical Supply System
  •  DRUM-TYPE SUPPLY SYSTEM
  •  DRUM-TYPE SUPPLY SYSTEM
  •  SLURRY SUPPLY SYSTEM
  •  HF SUPPLY SYSTEM

A system that can supply chemical needed for Semi-Conductor & LCD, TSP manufacturing process using the separate sub units. It can respond to the customer’s request for the undiluted chemical and the mixing ratio.

  • Method : Auto & Manual
  • Chemical : SC-1, HF, Slurry, ITO, H2SO4, HNO3, Solvent, Alkali
  • Controller : PLC & Touch Based Control
  • CMS & Data Base is capable to be constructed.
High-pressure DIW Supply System

High-pressure DIW Supply System

A system that can supply DIW needed for each process of manufacturing Semi-Conductor through different units using the separate system (HPDS). It can be designed according to the customer’s request in order to control the flow rate and pressure automatically.

  • Method : Auto ~ Manual
  • Tank Capacity : 20~500 Liter
  • DIW Flow Rate : 5 ~ 200 Liter/Min
  • Supply Pressure : 2 ~ 80 psig

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